Atomic-scale analysis of quantum nanostructures with the STM
- M. Johnson
- M. Pfister
- et al.
- 1995
- Microelectronic Engineering
Paper
Publications
221 results at Microelectronic Engineering
Doping profiling with scanning surface harmonic microscopy
- M. Johnson
- J.P. Bourgoin
- et al.
- 1995
- Microelectronic Engineering
PaperEnhanced e-beam system for the fabrication of optical elements
- D. Prongue ́
- H. Rothuizen
- et al.
- 1995
- Microelectronic Engineering
PaperMicromechanical structures for data storage
- T.C. Reiley
- L.-S. Fan
- et al.
- 1995
- Microelectronic Engineering
PaperAtomic hydrogen-induced degradation of the Si SiO2 structure
- E. Cartier
- J.H. Stathis
- 1995
- Microelectronic Engineering
PaperMicrofabrication of lenses of a miniaturized electron column
- M. Despont
- U. Staufer
- et al.
- 1995
- Microelectronic Engineering
PaperFabrication of high performance 512Kb SRAMs in 0.25 μm CMOS technology using x-ray lithography
- R. Viswanathan
- David Seeger
- et al.
- 1994
- Microelectronic Engineering
PaperHigh-resolution electron-beam lithography for fabricating visible semiconductor lasers with curved mirrors and integrated holograms
- P. Unger
- V. Boegli
- et al.
- 1994
- Microelectronic Engineering
PaperUsing simulation to analyze integrated tool performance in semiconductor manufacturing
- John Mauer
- Roland Schelasin
- 1994
- Microelectronic Engineering
PaperPhotolithography overview for 64 megabit production
- T. Leslie
- W. Arden
- et al.
- 1994
- Microelectronic Engineering
Paper