Low temperature Al-Cu planarization by PVD Al-Cu-Ge alloys (Invited lecture)
- R.V. Joshi
- 1997
- Microelectronic Engineering
Publications
221 results at Microelectronic Engineering
Explanation for the oxide thickness dependence of breakdown characteristics of metal-oxide-semiconductor structures
- D.J. Dimaria
- 1997
- Microelectronic Engineering
A conic primitive-based pattern generator for electron-beam lithography of diffractive optical elements
- H. Rothuizen
- D. Prongué
- et al.
- 1997
- Microelectronic Engineering
Electrical characterization of Si/Si0.7Ge0.3 quantum well wires fabricated by low damage CF4 reactive ion etching
- K.Y. Lee
- S.J. Koester
- et al.
- 1997
- Microelectronic Engineering
Potential fluctuations due to Pb centres at the Si/SiO2 interface
- M.J. Uren
- K.M. Brunson
- et al.
- 1997
- Microelectronic Engineering
Gate oxide characterization with ballistic electron emission microscopy
- R. Ludeke
- H.J. Wen
- 1997
- Microelectronic Engineering
Magnetic tunnel junctions fabricated at tenth-micron dimensions by electron beam lithography
- S. Rishton
- Y. Lu
- et al.
- 1997
- Microelectronic Engineering
Electron beam technology - SEM to microcolumn
- T.H.P. Chang
- M.G.R. Thomson
- et al.
- 1996
- Microelectronic Engineering
Microcolumn based low energy e-beam writing
- C. Stebler
- M. Despont
- et al.
- 1996
- Microelectronic Engineering
Electron-beam microcolumn fabrication and testing
- M. Despont
- U. Staufer
- et al.
- 1996
- Microelectronic Engineering