Dependence of spherical and chromatic aberration upon magnification in an immersion lensG.A. Wardly2003Journal of Applied Physics
Electrostatic wafer chuck for electron beam microfabricationGeorge A. Wardly2003Review of Scientific Instruments
Correction of eddy current errors in electron beam deflectionG.A. Wardly2003Journal of Applied Physics
Design study of toroidal deflection yokes with eddy-current compensationG.A. Wardly2003Journal of Applied Physics
Electrode Flatness Requirements for Cathode Projection Microfabrication SystemsGeorge A. Wardly1975IEEE T-ED