Progress in large area selective silicon deposition for TFT/LCD applications
- Jun H. Souk
- Gregory N. Parsons
- 1994
- MRS Spring Meeting 1994
Publications
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9 results for Gregory N. Parsons
Progress in large area selective silicon deposition for TFT/LCD applications
- J.H. Souk
- G.N. Parsons
- 1994
- MRS Spring Meeting 1994
Enhanced Mobility Top-Gate Amorphous Silicon Thin-Film Transistor with Selectively Deposited Source/Drain Contacts
- G.N. Parsons
- 1992
- IEEE Electron Device Letters
Bond selectivity in silicon film growth
- John J. Boland
- Gregory N. Parsons
- 1992
- Science
Microstructural evolution and substrate selectivity in PECVD μc-Si
- G.N. Parsons
- J.J. Boland
- et al.
- 1992
- Symposium on Dynamics in Small Confining Systems 1992
History of atomic layer deposition and its relationship with the American Vacuum Society
- Gregory N. Parsons
- Jeffrey W. Elam
- et al.
- 2013
- JVSTA
Selective Deposition and Bond Strain Relaxation in Silicon PECVD Using Time Modulated Silane Flow
- Gregory N. Parsons
- John J. Boland
- et al.
- 1992
- Japanese Journal of Applied Physics
Low hydrogen content stoichiometric silicon nitride films deposited by plasma-enhanced chemical vapor deposition
- G.N. Parsons
- J.H. Souk
- et al.
- 1991
- Journal of Applied Physics
Selective deposition of silicon by plasma-enhanced chemical vapor deposition using pulsed silane flow
- G.N. Parsons
- 1991
- Applied Physics Letters