Analysis of an extreme low-κ organosilicate dielectric film exposed to representative plasmas and to a restorative process
- M. Colburn
- S.V. Nitta
- et al.
- 2003
- AMC 2003
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390 results for Robert Miller
Effects of templating byproducts on adhesion of nanoporous dielectric films
- D. Maidenberg
- W. Volksen
- et al.
- 2003
- IITC 2003
Creating nanoporosity by selective extraction of porogens using supercritical carbon dioxide/cosolvent processes
- B. Lahlouh
- T. Rajagopalan
- et al.
- 2003
- MRS Proceedings 2003
Radiation effects in low dielectric constant methyl-silsesquioxane films
- Mihail P. Petkov
- Kelvin G. Lynn
- et al.
- 2002
- IEEE TNS
A facile approach to architecturally defined nanoparticles VTA intramolecular chain collapse and living free radical procedures
- Eva Harth
- Brooke Van Horn
- et al.
- 2002
- ACS National Meeting 2002
Spirobifluorene-linked orthogonal polymers with controlled conjugation lengths
- R.D. Miller
- F. Dötz
- et al.
- 2002
- ACS National Meeting 2002
Templates for nanoporosity in low dielectric films: Preparation of pore generating macromolecules by ruthenium ring opening metathesis polymerization
- Eric F. Connor
- Maridel C. Lares
- et al.
- 2002
- ACS National Meeting 2002
Pyrene fluorescence as a molecular probe of miscibility in organic/inorganic hybrid nanocomposites suitable for microelectronic applications
- Q.R. Huang
- David Mecerreyes
- et al.
- 2002
- MRS Proceedings 2002
Templating nanoporosity in organosilicates with well-defined branched macromolecules and block copolymers
- J.L. Hedrick
- M. Trollsas
- et al.
- 1999
- American Chemical Society, Polymer Preprints, Division of Polymer Chemistry
Efficient, blue light-emitting diodes using crosslinked polymer multilayers
- J.P. Chen
- G. Klaerner
- et al.
- 1999
- American Chemical Society, Polymer Preprints, Division of Polymer Chemistry