Publications

This is our catalog of recent publications authored by IBM researchers, in collaboration with the global research community. We’re currently adding our back catalog of more than 110,000 publications. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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Year

34 results for Hiroyuki Miyazoe

Plasma processing for advanced microelectronics beyond CMOS
- - Nathan Marchack
  - L. Buzi
  - et al.
- 2021
- Journal of Applied Physics
Effects of ultraviolet and vacuum ultraviolet synchrotron radiation on organic underlayers to modulate line-edge roughness of fine-pitch poly-silicon patterns
- - Hiroyuki Miyazoe
  - Sebastian U. Engelmann
  - et al.
- 2017
- JVSTA
Neural network learning using non-ideal resistive memory devices
- - Youngseok Kim
  - Tayfun Gokmen
  - et al.
- 2022
- Frontiers in Nanotechnology
Etching with electron beam-generated plasmas: Selectivity versus ion energy in silicon-based films
- - S. G. Walton
  - D. R. Boris
  - et al.
- 2021
- JVSTA
Utilizing photosensitive polymers to evaluate UV radiation exposures in different plasma chamber configurations
- - L. Buzi
  - Hiroyuki Miyazoe
  - et al.
- 2020
- JVSTA
A study on OTS-PCM pillar cell for 3-d stackable memory
- - W. Chien
  - C. Yeh
  - et al.
- 2018
- IEEE T-ED
Nitride etching with hydrofluorocarbons III: Comparison of C₄H₉F and CH₃F for low-k′ nitride spacer etch processes
- - Hiroyuki Miyazoe
  - Nathan Marchack
  - et al.
- 2018
- JVSTB
Nitride etching with hydrofluorocarbons. II. Evaluation of C₄H₉F for tight pitch Si₃N₄ patterning applications
- - Nathan Marchack
  - Hiroyuki Miyazoe
  - et al.
- 2018
- JVSTB
Highly selective dry etching of polystyrene-poly(methyl methacrylate) block copolymer by gas pulsing carbon monoxide-based plasmas
- - Hiroyuki Miyazoe
  - Ashish Jagtiani
  - et al.
- 2017
- Journal of Physics D: Applied Physics
Electron beam generated plasmas: Characteristics and etching of silicon nitride
- - S. G. Walton
  - D. R. Boris
  - et al.
- 2017
- Microelectronic Engineering