Publications

116 results for Conal Murray

High-performance Si_1-xGe_x channel on insulator trigate PFETs featuring an implant-free process and aggressively-scaled fin and gate dimensions
- - P. Hashemi
  - M. Kobayashi
  - et al.
- 2013
- VLSI Technology 2013
A next-generation in-situ nanoprobe beamline for the advanced photon source
- - Jörg Maser
  - Barry Lai
  - et al.
- 2013
- SPIE Optical Engineering + Applications 2013
Strain mapping of Si devices with stress memorization processing
- - Y.Y. Wang
  - John Bruley
  - et al.
- 2013
- Applied Physics Letters
Weighted mechanical models for residual stress determination using x-ray diffraction
- - Conal E. Murray
  - Stephen W. Bedell
  - et al.
- 2013
- Journal of Applied Physics
Submicron mapping of strain distributions induced by three-dimensional through-silicon via features
- - Conal E. Murray
  - T. Graves-Abe
  - et al.
- 2013
- Applied Physics Letters
Characterization of room temperature recrystallization kinetics in electroplated copper thin films with concurrent x-ray diffraction and electrical resistivity measurements
- - Mikhail Treger
  - Christian Witt
  - et al.
- 2013
- Journal of Applied Physics
Evolution of strain energy during recrystallization of plated Cu films
- - Conal E. Murray
  - Robert Rosenberg
  - et al.
- 2013
- Journal of Applied Physics
Equivalence of Kröner and weighted Voigt-Reuss models for x-ray stress determination
- - Conal E. Murray
- 2013
- Journal of Applied Physics
Probing strain at the nanoscale with X-ray diffraction in microelectronic materials induced by stressor elements
- - Conal E. Murray
  - S. Polvino
  - et al.
- 2013
- Thin Solid Films
Mitigating residual stress in Cu metallization
- - Conal E. Murray
  - Jean Jordan-Sweet
  - et al.
- 2012
- Applied Physics Letters