Laser vs. Blade Dicing for Direct Bonded Heterogeneous Integration (DBHi) Si BridgeAakrati JainKamal Sikkaet al.2021ECTC 2021
Plasma Activated Low-temperature Die-level Direct Bonding with Advanced Wafer Dicing Technologies for 3D Heterogeneous IntegrationKatsuyuki SakumaDishit Parekhet al.2021ECTC 2021