Super-halo asymmetric vertical pass transistor design for ultra-dense DRAM technologies
- D. Chidambarrao
- K. McStay
- et al.
- 2003
- VLSI-TSA 2003
Conference paper
Publications
39 results for Dureseti Chidambarrao
Combined dislocation and process modeling for local oxidation of silicon structure
- D. Chidambarrao
- X.H. Liu
- et al.
- 2002
- Journal of Applied Physics
PaperThe effect of current density, stripe length, stripe width, and temperature on resistance saturation during electromigration testing
- R. Filippi
- R.A. Wachnik
- et al.
- 2002
- Journal of Applied Physics
PaperBackside sputter depth profiling of phosphorus diffusion from a polysilicon source
- P.A. Ronsheim
- D. Chidambarrao
- et al.
- 2002
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Conference paperDislocation modeling for the silicon world
- K.W. Schwarz
- X.H. Liu
- et al.
- 2001
- Materials Science and Engineering: A
PaperDislocation dynamics near film edges and corners in silicon
- K.W. Schwarz
- D. Chidambarrao
- 1999
- Journal of Applied Physics
PaperNitrogen implantation and diffusion in silicon
- Lahir Shaik Adam
- Mark E. Law
- et al.
- 1999
- MRS Spring Meeting 1999
PaperNumerical simulation of the X-ray stress analysis technique in polycrystalline materials under elastic loading
- D. Chidambarrao
- Y.C. Song
- et al.
- 1997
- Metallurgical and Materials Transactions A: Physical Metallurgy and Materials Science
PaperThin-film temperature rise estimates during low energy ion bombardment in a plasma reactor
- M. Naeem
- D. Chidambarrao
- 1995
- Applied Physics Letters
Paper