Publications

32 results for Kristin Schmidt

Electrical study of DSA shrink process and CD rectification effect at sub-60nm using EUV test vehicle
- - Cheng Chi
  - Chi Chun Liu
  - et al.
- 2017
- SPIE Advanced Lithography 2017
Ultrathin EUV patterning stack using polymer brush as an adhesion promotion layer
- - Indira Seshadri
  - Anuja De Silva
  - et al.
- 2017
- SPIE Advanced Lithography 2017
DSA patterning options for logics and memory applications
- - Chi Chun Liu
  - Elliott Franke
  - et al.
- 2017
- SPIE Advanced Lithography 2017
Design technology co-optimization assessment for directed self-Assembly-based lithography: Design for directed self-Assembly or directed self-Assembly for design
- - Kafai Lai
  - Chi Chun Liu
  - et al.
- 2017
- J. Micro/Nanolithogr. MEMS MOEMS
Orientation Control of Block Copolymers Using Surface Active, Phase-Preferential Additives
- - Ankit Vora
  - Kristin Schmidt
  - et al.
- 2016
- ACS AMI
Nanoscale chemical imaging by photoinduced force microscopy
- - Derek Nowak
  - William Morrison
  - et al.
- 2016
- Science Advances
DSA via hole shrink for advanced node applications
- - Cheng Chi
  - Chi Chun Liu
  - et al.
- 2016
- SPIE Advanced Lithography 2016
Strategies to enable directed self-Assembly contact hole shrink for tight pitches
- - Kristin Schmidt
  - Hitoshi Osaki
  - et al.
- 2016
- SPIE Advanced Lithography 2016
Development of polycarbonate-containing block copolymers for thin film self-assembly applications
- - Ankit Vora
  - Rudy J. Wojtecki
  - et al.
- 2016
- Polymer Chemistry
Synthesis and thin-film self-assembly of cylinder-forming high- χ block copolymers
- - Ankit Vora
  - Gabriela Alva
  - et al.
- 2016
- J. Photopolym. Sci. Tech.