Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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6 results for Rajesh Sathiyanarayanan

Understanding and mitigating High-k induced device width and length dependencies for FinFET replacement metal gate technology
- - Takashi Ando
  - Tenko Yamashita
  - et al.
- 2015
- IEDM 2015
A novel ALD SiBCN low-k spacer for parasitic capacitance reduction in FinFETs
- - Tenko Yamashita
  - S. Mehta
  - et al.
- 2015
- VLSI Technology 2015
Impact of oxygen plasma on nitrided and annealed atomic layer deposited SiO₂/high-k/metal gate for high-voltage input and output fin-shaped field effect transistor devices
- - Shahab Siddiqui
  - Min Dai
  - et al.
- 2017
- JVSTB
Nitrogen diffusion in hafnia and the impact of nitridation on oxygen and hydrogen diffusion: A first-principles study
- - Rajesh Sathiyanarayanan
  - Rajan K. Pandey
  - et al.
- 2015
- Journal of Applied Physics
Role of point defects and HfO₂/TiN interface stoichiometry on effective work function modulation in ultra-scaled complementary metal-oxide-semiconductor devices
- - Rajan K. Pandey
  - Rajesh Sathiyanarayanan
  - et al.
- 2013
- Journal of Applied Physics
Dielectric properties of Si_3-ξGe_ξN₄ and Si_3-ξC_ξN₄: A density functional study
- - Kanchan Ulman
  - Rajesh Sathiyanarayanan
  - et al.
- 2013
- Journal of Applied Physics