Publications

This is our catalog of recent publications authored by IBM researchers, in collaboration with the global research community. We’re currently adding our back catalog of more than 110,000 publications. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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6 results for Zhan Chen

SFG analysis of the molecular structures at the surfaces and buried interfaces of PECVD ultralow-dielectric constant pSiCOH: Reactive ion etching and dielectric recovery
- - John N. Myers
  - Xiaoxian Zhang
  - et al.
- 2017
- Applied Physics Letters
Plasma treatment effect on polymer buried interfacial structure and property
- - Nathan W. Ulrich
  - John Andre
  - et al.
- 2017
- Physical Chemistry Chemical Physics
SFG analysis of the molecular structures at the surfaces and buried interfaces of PECVD ultralow-dielectric constant pSiCOH
- - Xiaoxian Zhang
  - John N. Myers
  - et al.
- 2016
- Journal of Applied Physics
Nondestructive Characterization of Molecular Structures at Buried Copper/Epoxy Interfaces and Their Relationship to Locus of Failure Analysis
- - John N. Myers
  - Xiaoxian Zhang
  - et al.
- 2015
- IEEE Transactions on CPMT
Probing the molecular structures of plasma-damaged and surface-repaired low-k dielectrics
- - Xiaoxian Zhang
  - John N. Myers
  - et al.
- 2015
- Physical Chemistry Chemical Physics
Nondestructive in situ characterization of molecular structures at the surface and buried interface of silicon-supported low-k dielectric films
- - John N. Myers
  - Xiaoxian Zhang
  - et al.
- 2015
- Journal of Physical Chemistry B