Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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3 results for E.C. Paloura

Electron beam induced damage in N-rich SiN_x films deposited by plasma enhanced chemical vapour deposition
- - Ch.B. Lioutas
  - N. Vouroutzis
  - et al.
- 1997
- Thin Solid Films
Microstructure modifications induced by bonded hydrogen in N-rich SiN_x:H films
- - E.C. Paloura
  - Ch.B. Lioutas
  - et al.
- 1996
- Journal of Applied Physics
On the effect of bonded hydrogen in the local microstructure of PECVD SiN_x:H films
- - E.C. Paloura
  - Y. Kuo
  - et al.
- 1995
- Physica B: Physics of Condensed Matter