A 0.6 µm2 256Mb Trench DRAM Cell with Self-Aligned Buried Strap (BEST)L.A. NesbitJ. Alsmeieret al.1993IEDM 1993
SODEL FET: Novel channel and source/drain profile engineering schemes by selective Si epitaxial growth technologySatoshi InabaKiyotaka Miyanoet al.2004IEEE Transactions on Electron Devices