Toward successful integration of porous low-k materials: Strategies addressing plasma damage
- Krystelle Lionti
- Willi Volksen
- et al.
- 2014
- ECS J. Solid State Sci. Technol.
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Hybrid low dielectric constant thin films for microelectronics
- Willi Volksen
- Krystelle Lionti
- et al.
- 2014
- Scripta Materialia
Independent control of adhesive and bulk properties of hybrid silica coatings on polycarbonate
- Krystelle Lionti
- Linying Cui
- et al.
- 2013
- ACS AMI