Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

Date

Start

End

Featured collections

Popular topics

4 results for Kurt Kimmel

Initial experience establishing a EUV baseline lithography process for manufacturability assessment
- - O.R. Wood II
  - D. Back
  - et al.
- 2007
- SPIE Advanced Lithography 2007
Progress towards developing high performance immersion compatible materials and processes
- - Karen Petrillo
  - Kaushal Patel
  - et al.
- 2005
- Microlithography 2005
Novel Si-based composite thin films for 193/157 nm attenuated phase shift mask(APSM) applications
- - S. Jay Chey
  - C.R. Guarnieri
  - et al.
- 2001
- Proceedings of SPIE - The International Society for Optical Engineering
High-accuracy defect-free X-Ray mask technology
- - Steven C. Nash
  - Thomas B. Faure
  - et al.
- 1994
- Japanese Journal of Applied Physics