Electromigration and diffusion in pure Cu and Cu(Sn) alloys
- C.-K. Hu
- K.L. Lee
- et al.
- 1996
- MRS Spring Meeting 1996
Publications
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13 results for P.G. Blauner
Electromigration and diffusion in pure Cu and Cu(Sn) alloys
- C.-K. Hu
- K.L. Lee
- et al.
- 1996
- MRS Spring Meeting 1996
Focused ion beam metrology
- A. Wagner
- P.G. Blauner
- et al.
- 1995
- MRS Fall Meeting 1995
High conductivity FIB deposited metal
- P.G. Blauner
- A. Wagner
- 1995
- MRS Fall Meeting 1995
Electrodeposited gold;real times stress and structural chance at room temperature
- R.E. Acosta
- I. Babich
- et al.
- 1993
- MRS Spring Meeting 1993
Process latitude study of focused ion-beam-deposited gold for clear x-ray mask repair
- Patricia G. Blauner
- Andrew D. Dubner
- et al.
- 1993
- Microlithography 1993
Photoresist process latitude optimization for synchrotron x-ray lithography
- Andrew T. Pomerene
- David E. Seeger
- et al.
- 1993
- Microlithography 1993
Elecromigration damage in fine Al alloy lines due to interfacial diffusion
- C.-K. Hu
- M.B. Small
- et al.
- 1993
- MRS Proceedings 1993
Model for focused ion beam deposition
- J.P. Levin
- P.G. Blauner
- et al.
- 1990
- Microlithography 1990
High resolution x-ray mask repair
- P.G. Blauner
- 1995
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures