Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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7 results for T. Newman

High-performance 0.08 μm CMOS
- - L. Su
  - S. Subbanna
  - et al.
- 1996
- VLSI Technology 1996
Phase edge lithography for sub 0.1 μm electrical channel length in a 200 MM full CMOS process
- - P. Agnello
  - T. Newman
  - et al.
- 1995
- VLSI Technology 1995
A comprehensive evaluation of major phase shift mask technologies for isolated gate sinictuies in logic designs
- - Lars W. Liebmann
  - Thomas H. Newman
  - et al.
- 1994
- Microlithography 1994
Quantitative stepper metrology using the focus monitor test mask
- - T.A. Brunner
  - A.L. Martin
  - et al.
- 1994
- Microlithography 1994
Submicron YBa₂Cu₃O_7-δ grain boundary junction dc SQUIDs
- - M. Kawasaki
  - P. Chaudhari
  - et al.
- 1991
- Applied Physics Letters
Lithographic performance of an EL-3 system at 0.25μm groundrules
- - T. Newman
  - M.G.R. Thomson
  - et al.
- 1991
- Microelectronic Engineering
Application of variable shaped electron beam technology to the development of 0.5 micron CMOS technology with extensions to 0.25 micron
- - P. Coane
  - P. Rudeck
  - et al.
- 1989
- Microelectronic Engineering