Electron beam microcolumn for multi-beam applications
- E. Kratschmer
- H.S. Kim
- et al.
- 1995
- IVMC 1995
Publications
50 results for K.Y. Lee
Micromachining applications of a high resolution ultrathick photoresist
- K.Y. Lee
- N. LaBianca
- et al.
- 1995
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Electron-phonon interaction in the transport properties of quantum wires
- J. Wróbel
- T. Brandes
- et al.
- 1995
- EPL
Electromigration and stress-induced voiding in fine Al and Al-alloy thin-film lines
- C.-K. Hu
- K.P. Rodbell
- et al.
- 1995
- IBM J. Res. Dev
The microstructural stability of Al(Cu) lines during electromigration
- T.M. Shaw
- C.-K. Hu
- et al.
- 1995
- Applied Physics Letters
Fabrication of Aharonov-Bohm rings in Si/SiGe heterostructure
- K.Y. Lee
- K. Ismail
- et al.
- 1995
- Microelectronic Engineering
Optical properties of ultrathin 50nm GaAs membranes
- D.P. Halliday
- J.M. Eggleston
- et al.
- 1995
- Solid State Communications
Tunneling between edge states in clean multiple GaAs/AlxGa1-xAs rings and increase of the phase coherence length with magnetic field
- J. Liu
- W.X. Gao
- et al.
- 1994
- Physical Review B
Observation of ballistic conductance and Aharonov-Bohm oscillations in Si/SiGe heterostructures
- W.X. Gao
- K. Ismail
- et al.
- 1994
- Applied Physics Letters
Phase coherence and tunneling between edge-states in multiple GaAs/AlxGa-x-x-xAs rings
- J. Liu
- W.X. Gao
- et al.
- 1994
- Journal of Low Temperature Physics