Buried-trench DRAM cell using a self-aligned epitaxy over trench technologyN.C.-C. LuT.V. Rajeevakumaret al.1988IEDM 1988
A Substrate-Plate Trench-Capacitor (SPT) Memory Cell for Dynamic RAM'sNicky Chau-Chun LuTak H. Ninget al.1986IEEE Journal of Solid-State Circuits