One-Micron Polycide (WSI2 on Poly-Si) MOSFET Technology
- M.Y. Tsai
- H.H. Chao
- et al.
- 2019
- JES
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3 results for R.S. Bennett
RIE Contamination of Etched Silicon Surfaces
- L.M. Ephrath
- R.S. Bennett
- 2019
- JES
In situ laser diagnostic studies of plasma-generated particulate contamination
- G.S. Selwyn
- J. Singh
- et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films