Publications

3 results for Thomas P. Donohue

X-ray lithography for ≤100 nm ground rules in complex patterns
- - Scott Hector
  - Victor Pol
  - et al.
- 1997
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
1 µm MOSFET VLSI Technology: Part VI― Electron-Beam Lithography
- - Warren D. Grobman
  - Hans E. Luhn
  - et al.
- 1979
- IEEE JSSC
1 μm MOSFET VLSI Technology: Part VI—Electron-Beam Lithography
- - Warren D. Grobman
  - Hans E. Luhn
  - et al.
- 1979
- IEEE T-ED