XY table and tilting stage for scanning electron microscope (SEM)

Oliver C. Wells

doi:10.1063/1.1134018

Review of Scientific Instruments

Paper

02 Sep 2008

XY table and tilting stage for scanning electron microscope (SEM)

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Abstract

This paper describes a low-vibration specimen stage in which the specimen is held by a block which slides on Teflon pads over the lower surface of the SEM lens. It provides X, Y, and tilting motions.

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New contrast mechanism for scanning electron microscope

Oliver C. Wells

Applied Physics Letters

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Past, present, and future of backscatter electron (BSE) imaging

Oliver C. Wells, Michael S. Gordon, et al.

ScMi 2012

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Discussion of ways to energy-filter the electron backscattering pattern (EBSP) in the scanning electron microscope (SEM)

Oliver C. Wells

Microscopy and Microanalysis

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Applications of image diagnostics to metrology quality assurance and process control

John A. Allgair, Victor V. Boksha, et al.

SPIE Advanced Microelectronic Manufacturing 2003

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Abstract

Related

New contrast mechanism for scanning electron microscope

Past, present, and future of backscatter electron (BSE) imaging

Discussion of ways to energy-filter the electron backscattering pattern (EBSP) in the scanning electron microscope (SEM)

Applications of image diagnostics to metrology quality assurance and process control