XY table and tilting stage for scanning electron microscope (SEM)

Oliver C. Wells

doi:10.1063/1.1134018

Review of Scientific Instruments

Paper

02 Sep 2008

XY table and tilting stage for scanning electron microscope (SEM)

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Abstract

This paper describes a low-vibration specimen stage in which the specimen is held by a block which slides on Teflon pads over the lower surface of the SEM lens. It provides X, Y, and tilting motions.

Paper

Top-down topography of deeply etched silicon in the scanning electron microscope

Oliver C. Wells, Conal E. Murray, et al.

Review of Scientific Instruments

Conference paper

The history and future of the SEM - A personal view

Oliver C. Wells

M&M 2006

Paper

Magnetic Domains in Thin-Film Recording Heads as Observed in the SEM by a Lock-In Technique

Oliver C. Wells, Richard J. Savoy

IEEE Transactions on Magnetics

Paper

Discussion of ways to energy-filter the electron backscattering pattern (EBSP) in the scanning electron microscope (SEM)

Oliver C. Wells

Microscopy and Microanalysis

View all publications

Abstract

Related

Top-down topography of deeply etched silicon in the scanning electron microscope

The history and future of the SEM - A personal view

Magnetic Domains in Thin-Film Recording Heads as Observed in the SEM by a Lock-In Technique

Discussion of ways to energy-filter the electron backscattering pattern (EBSP) in the scanning electron microscope (SEM)