Publication
Review of Scientific Instruments
Paper

XY table and tilting stage for scanning electron microscope (SEM)

View publication

Abstract

This paper describes a low-vibration specimen stage in which the specimen is held by a block which slides on Teflon pads over the lower surface of the SEM lens. It provides X, Y, and tilting motions.

Date

02 Sep 2008

Publication

Review of Scientific Instruments

Authors

Share