Abstract
Using low-energy electron microscopy we have found a new phase transition on the Si(001) surface at miscut angles smaller than 0.1°. The surface phase separates into facets with 300 terrace width, and regions with much larger, wavy terraces. This wavy phase is stabilized by a reduction of surface-stress-induced strain energy. A theoretical study by Tersoff and Pehlke compares favorably with our observations. © 1992 The American Physical Society.