Min Yang, Jeremy Schaub, et al.
Technical Digest-International Electron Devices Meeting
Paper
Auger analyzer translation using ball bushings
Abstract
We describe a ball bushing assembly which supports a cylindrical mirror analyzer allowing it to be translated 5.5 in. By a linear motion feedthrough. The assembly mounts on an 8-in. Flange and avoids the use of bellows. © 1988, American Vacuum Society. All rights reserved.
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