Jun Mukawa, Seiichirou Takahashi, et al.
J. Photopolym. Sci. Tech.
Jun Mukawa, Seiichirou Takahashi, et al.
J. Photopolym. Sci. Tech.
Toyohiro Aoki, Takashi Hisada, et al.
ECTC 2016
Kuniaki Sueoka, Akihiro Horibe, et al.
3DIC 2015
Shintaro Yamamichi, Akihiro Horibe, et al.
VLSI Technology 2017