PaperA Study of Luminescent Centers in Reactive-Ion-Etched SiliconT.D. Bestwick, G.S. Oehrlein, et al.JES
PaperSummary Abstract: Preparation of Pb-Bi film by alloy evaporation II. Microstructure and morphologyH.-C.W. Huang, C.M. SerranoJVSTA
PaperA photoluminescence study of CF4 reactive-ion-etched silicon: Various process conditions and magnetically enhanced etchingA. Henry, B. Monemar, et al.Journal of Applied Physics