J.A. Barker, D. Henderson, et al.
Molecular Physics
No abstract available.
J.A. Barker, D. Henderson, et al.
Molecular Physics
J. Paraszczak, J.M. Shaw, et al.
Micro and Nano Engineering
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
J.H. Stathis, R. Bolam, et al.
INFOS 2005