Conference paper
Characterization of line width variation
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
No abstract available.
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
Elizabeth A. Sholler, Frederick M. Meyer, et al.
SPIE AeroSense 1997
A. Skumanich
SPIE OE/LASE 1992
Charles Micchelli
Journal of Approximation Theory