Conference paper
Characterization of a next generation step-and-scan system
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SPIE Advanced Lithography 1998
No abstract available.
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
George Markowsky
J. Math. Anal. Appl.
Martin Charles Golumbic, Renu C. Laskar
Discrete Applied Mathematics
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Mathematical Programming