Douglass S. Kalika, David W. Giles, et al.
Journal of Rheology
The emerging trends in photoresists and advanced patterning materials are described, including functional fluoropolymers, molecular glasses, and imprint resists. ©2007TAPJ.
Douglass S. Kalika, David W. Giles, et al.
Journal of Rheology
Revanth Kodoru, Atanu Saha, et al.
arXiv
Surendra B. Anantharaman, Joachim Kohlbrecher, et al.
MRS Fall Meeting 2020
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering