Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
High-field, far-infrared magneto-absorption experiments are performed in semimetallic InAs-GaSb superlattices. The spectra exhibit extensive oscillations of cyclotron resonance and interband absorption from valence to conduction subbands. Transitions at both the center and the boundary of the superlattice zone are observed, from which the width of the ground conduction subband is obtained, demonstrating directly its three-dimensional character. © 1981.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
I. Morgenstern, K.A. Müller, et al.
Physica B: Physics of Condensed Matter
William G. Van der Sluys, Alfred P. Sattelberger, et al.
Polyhedron
Michael Ray, Yves C. Martin
Proceedings of SPIE - The International Society for Optical Engineering