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Publication
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Paper
Thin film confinement effects on the thermal properties of model photoresist polymers
Abstract
Thin film confinement issues in poly(hydroxy styrene) (PHS) were addressed using both specular x-ray reflectivity (SXR) and incoherent neutron scattering (INS). SXR measured the uniformity and thickness of PHS films supported on various substrates as a function of temperature. On the other hand, INS directly probed the dynamics of a hydrogeneous polymer by measuring the amplitude of the average mean-square atomic displacements.