Thin film confinement effects on the thermal properties of model photoresist polymers

Abstract

Thin film confinement issues in poly(hydroxy styrene) (PHS) were addressed using both specular x-ray reflectivity (SXR) and incoherent neutron scattering (INS). SXR measured the uniformity and thickness of PHS films supported on various substrates as a function of temperature. On the other hand, INS directly probed the dynamics of a hydrogeneous polymer by measuring the amplitude of the average mean-square atomic displacements.