Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The high-temperature transition at 340 °C for the homopolymer of p-hydroxybenzoic acid (PHBA) has been shown to display characteristics typical of a plastic crystal or a highly ordered smectic phase transition. For low molecular weight samples of the homopolymer a nematic texture can be induced above this phase transition by modest external shear. However, for high molecular weight samples the material is intractable in this temperature regime. A much higher transition at 445 °C has been identified and characterized by DSC, TMA, and polarized light microscopy, indicating the presence of a nematic mesophase. Processing of the homopolymer above this transition results in fusion of the material. © 1988, American Chemical Society. All rights reserved.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Ronald Troutman
Synthetic Metals
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
S.F. Fan, W.B. Yun, et al.
Proceedings of SPIE 1989