Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
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The addition variation, 1,2 and 1,4 units, and the geometrical isomerism, 1,4‐cis and 1,4‐trans units, of a fractionated polybutadiene were determined as a function of molecular weight using preparative gel permeation chromatography followed by infrared analysis of the fractions. Both the addition variation and geometrical isomerism remained essentially constant across the molecular weight distribution. Copyright © 1976 John Wiley & Sons, Inc.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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EMC 2001
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