Conference paper
Optimization of real phase-mask performance
F.M. Schellenberg, M. Levenson, et al.
BACUS Symposium on Photomask Technology and Management 1991
Let - 2 s c £ 2. In this paper we find the precise upper and lower bounds on die nth Taylor coefficient an of functions f(z) = z + cz% + akz typically real in the unit disk for n = 3, 4.In addition all the extremal functions are identified. © 1973 American Mathematical Society.
F.M. Schellenberg, M. Levenson, et al.
BACUS Symposium on Photomask Technology and Management 1991
Peter Wendt
Electronic Imaging: Advanced Devices and Systems 1990
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SPIE Advanced Lithography 2010
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Proceedings of SPIE - The International Society for Optical Engineering