Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Paper
Techniques for determining threshold
Abstract
Two techniques for determining threshold are compared to capatitance date. Errors from using 77 K thresholds are determined and the effect on measurements on NA+ doped samples estimated. © 1980, All rights reserved.
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