SURFACE INSPECTION - RESEARCH AND DEVELOPMENT.

Abstract

Surface inspection techniques are used for process learning, quality verification, and postmortem analysis in manufacturing for a spectrum of disciplines. We will first summarize trends in surface analysis for integrated circuits, high density interconnection boards, and magnetic disks, emphasizing on-line applications as opposed to off-line or development techniques. We will then look more closely at microcontamination detection from both a patterned defect and a particulate inspection point of view.