J.A. Van Vechten
Physica B+C
We demonstrate for the first time that the phase shift associated with amplitude modulated, near band-edge photoluminescence from Si at room temperature can be used to map defects and carrier lifetimes over full wafers with depth sensitivity.
J.A. Van Vechten
Physica B+C
J.S. Batchelder, M.A. Taubenblatt
Microcontamination
T.S. Kuan, K.K. Shih, et al.
JES
M.A. Taubenblatt, J.S. Batchelder
Applied Optics