John G. Long, Peter C. Searson, et al.
JES
No abstract available.
John G. Long, Peter C. Searson, et al.
JES
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Shiyi Chen, Daniel Martínez, et al.
Physics of Fluids