Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
No abstract available.
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
J. Tersoff
Applied Surface Science
S.F. Fan, W.B. Yun, et al.
Proceedings of SPIE 1989
Andreas C. Cangellaris, Karen M. Coperich, et al.
EMC 2001