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Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper
01 Jan 1988

Summary Abstract: Desorption dynamics of SiF4etch product

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Abstract

No abstract available.

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Date

01 Jan 1988

Publication

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Authors

  • F.A. Houle
IBM-affiliated at time of publication

Topics

  • Physical Sciences
  • Materials Discovery

Resources

  • Publication

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