Conference paper
RAPID ANNEALING OF SILICON.
R.T. Hodgson, V.R. Deline, et al.
MRS Proceedings 1983
R.T. Hodgson, V.R. Deline, et al.
MRS Proceedings 1983
S. Mader, A.S. Nowick
Applied Physics Letters
P. Chaudhari, S. Mader
Applied Physics Letters
S. Mader, S.R. Herd
Thin Solid Films