E. Cartier
Microelectronics Reliability
Stress induced charge trapping effects in SiO2/Al 2O3 gate stacks were investigated. Current-voltage (I-V) and capacitance-voltage (C-V) sensing techniques were used. The results show a strong asymmetric charge trapping effects which is due to asymmetry of the SiO2/Al2O3 and difference in work function between the TiN electrode and the Si substrate.
E. Cartier
Microelectronics Reliability
J.M. Atkin, R.B. Laibowitz, et al.
IRPS 2009
D.J. DiMaria, D. Arnold, et al.
Applied Physics Letters
Z. Ren, M.V. Fischetti, et al.
IEDM 2003