About cookies on this site Our websites require some cookies to function properly (required). In addition, other cookies may be used with your consent to analyze site usage, improve the user experience and for advertising. For more information, please review your options. By visiting our website, you agree to our processing of information as described in IBM’sprivacy statement. To provide a smooth navigation, your cookie preferences will be shared across the IBM web domains listed here.
Publication
Surface Science
Paper
STM applications for semiconductor materials and devices
Abstract
Future progress in the semiconductor industry relies strongly on the ability to fabricate increasingly complex structures. As individual device dimensions become smaller and smaller, a new level of fundamental understanding of materials and processes at surfaces and interfaces is necessary. Using the unique structural and electrical properties of STM a number of different problems can be addressed. The key areas of semiconductor materials and processes will be reviewed to point out important and outstanding issues. Specific examples will be discussed to illustrate the potential impact of STM. © 1987.