D. Guidotti
Review of Progress in Quantitative Nondestructive Evaluation
Paper
Spatially resolved defect mapping in semiconductors using laser-modulated thermoreflectance
Abstract
We demonstrate that thermoreflectance can be observed when lattice heating is effected with an amplitude modulated laser. Changes in reflectivity are probed with a cw laser, and maps of inhomogeneous ion implantation and swirl precipitates in Si wafers are obtained.
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