Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A class of dynamic resource allocation problems with infinite planning horizon are studied. We observe special structures in the dynamic programming formulation of the problem, which enable us to convert it to continuous optimization problems that can be more easily solved. Structural properties of the problems are discussed, and explicit solutions are given for some special cases. © 2005 IEEE.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Elliot Linzer, M. Vetterli
Computing
Ohad Shamir, Sivan Sabato, et al.
Theoretical Computer Science
Fan Zhang, Junwei Cao, et al.
IEEE TETC