Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The design and implementation of a multiprocessor-based communication subsystem—the Parallel Protocol Engine (PPE)—for the parallel and pipelined execution of protocols are described. As an example, an implementation of the ISO 8802-2.2 Logical Link Control on a four-processor version of the PPE is presented and analyzed. The performance of the implementation is more than 16000 Type 2 Information Protocol Data Units/s, commensurate with emerging high-speed networks that operate in the 100 Mb/s range. The overall end-to-end performance of an integrated system, where two workstations, each equipped with a PPE, communicate via a high-speed link, is then analyzed and the problems concerning the soft- and hardware interface to the PPE are presented. © 1993 IEEE
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Xiaozhu Kang, Hui Zhang, et al.
ICWS 2008
S.M. Sadjadi, S. Chen, et al.
TAPIA 2009
Leo Liberti, James Ostrowski
Journal of Global Optimization