A.D. Marwick, G.S. Oehrlein, et al.
Physical Review B
A kinetic study of thermal donor formation in 450 °C heat-treated modern silicon crystals has been performed and it is concluded that SiO 3 complexes are the dominant thermal donor species (for heat-treatment times of up to about 100 h), rather than SiO4 complexes. Clusters containing a number of oxygen atoms other than three or four seem to be also electrically active.
A.D. Marwick, G.S. Oehrlein, et al.
Physical Review B
R. Bruce, T. Lin, et al.
Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
G.S. Oehrlein, J.G. Clabes, et al.
JES
Li Ling, X. Hua, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures