Silicon Micro Mechanics (SIMM): Si-beams with rectangular cross-section for atomic force sensing by means of STM

William Hinsberg, Joy Cheng, et al.

SPIE Advanced Lithography 2010

Frank R. Libsch, Takatoshi Tsujimura

Active Matrix Liquid Crystal Displays Technology and Applications 1997

Revanth Kodoru, Atanu Saha, et al.

arXiv

William G. Van der Sluys, Alfred P. Sattelberger, et al.

Polyhedron