PublicationMicroelectronic EngineeringPaperSilicon Micro Mechanics (SIMM): Si-beams with rectangular cross-section for atomic force sensing by means of STMMicroelectronic EngineeringView publicationAbstractNo abstract available.Home↳ PublicationsDate01 Jan 1986PublicationMicroelectronic EngineeringAuthorsO. WolterJ. GreschnerU. DürigIBM-affiliated at time of publicationTopicsPhysical SciencesShare
