Ultrathin membrane, masks for electron projection lithography
- O.R. Wood II
- W.J. Trybula
- et al.
- 2004
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
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4 results for J. Greschner
Magnetic force microscopy with batch-fabricated force sensors
- P. Grütter
- D. Rugar
- et al.
- 1991
- Journal of Applied Physics
Batch fabricated sensors for magnetic force microscopy
- P. Grütter
- D. Rugar
- et al.
- 1990
- Applied Physics Letters
Silicon Micro Mechanics (SIMM): Si-beams with rectangular cross-section for atomic force sensing by means of STM
- O. Wolter
- J. Greschner
- et al.
- 1986
- Microelectronic Engineering